3-D Atom Probe Tomography of Resin Embedded Samples?

Atom probe tomography in nanoelectronics

The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...

Atom Probe Tomographic Mapping Directly Reveals the Atomic Distribution of Phosphorus in Resin Embedded Ferritin.

Here we report the atomic-scale analysis of biological interfaces within the ferritin protein using atom probe tomography that is facilitated by an advanced specimen preparation approach. Embedding ferritin in an organic polymer resin lacking nitrogen provided chemical contrast to visualise atomic distributions and distinguish the inorganic-organic interface of the ferrihydrite mineral core and...

Toward atom probe tomography of microelectronic devices

Atom Probe Tomography of Oxide Scales

Atom probe tomography, APT, is the only microstructural method that can routinely analyse and position individual atoms in a material with a spatial resolution of 0.1-0.5 nm. Recent implementation of pulsed-laser to APT made investigation of less conducting materials, such as oxides, feasible. In this paper a short description of the principle of the techniques is presented. It is followed by e...

Atom-Probe Tomography of Meteoritic Nanodiamonds

1 Robert A. Pritzker Center for Meteoritics and Polar Studies, The Field Museum of Natural History, Chicago, IL, USA. E-mail: [email protected] 2 Chicago Center for Cosmochemistry, The University of Chicago, Chicago, IL, USA. 3 Northwestern University Center for Atom-Probe Tomography, Department of Materials Science & Engineering, Northwestern University, Evanston, IL, USA. 4 Materials Sci...